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For O2 Cleaning / Air Cleaning

【 Best for mounting process and assembly process 】

●Surface treatment before metal plating

●Surface treatment of wire bonding of flipchip bonding

●Cleaning before under-filling, after surface mount process

●Surface treatment of sealing of electronic components, such as LSIs, memories, MEMS or LEDs



 

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For O2 Cleaning(3 sensitivity types)

Optimal for plasma process where radicals are mainly working, such as O2, N2, Air, CH4, H2, NH3(Sometimes Ar also, under certain condition)

Also adoptable for UV or UV ozone cleaning, as it is responsible to Oxygen radicals.

For Ar Cleaning(3 sensitivity types)

This indicator responds to the plasma where mainly ions are working such as Ar gas, which is defficult to be defected by O2 cleaning type indicator.

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For O2 / Ar cleaning : Color change characteristic

Applications for uniformity evaluation

Uniforminity can be evaluated Color difference mapping(example)
Specifications
PLAZMARK For O2 Cleaning

Plasma generated mainly radicals like O2 plasma(O2, N2, Air, H2, NH3, (Ar))

Type No.1 (High)
Shape Card Label Sheet
Heat Resistance 100℃
Structure Substrate:Pet Film / Color Change Part : Organic Colorants. Resin
Size Substrate:20×70×0.2mm Substrate:210×297×0.2mm
Color Change Part : φ11mm Color Change Part : 190×290mm
Q'ty / Pack 100 pcs 100 pcs 5 sheets
Pord.No PLC0207-01 PLL0207-01 PLC2130-01
Type No.2 (Middle)
Shape Card Label Sheet
Heat Resistance 100℃
Structure Substrate:Pet Film / Color Change Part : Organic Colorants. Resin
Size Substrate:20×70×0.2mm Substrate:210×297×0.2mm
Color Change Part : φ11mm Color Change Part : 190×290mm
Q'ty / Pack 100 pcs 100 pcs 5 sheets
Pord.No PLC0207-02 PLL0207-02 PLC2130-02
Type No.3 (Low)
Shape Card Label Sheet
Heat Resistance 100℃
Structure Substrate:Pet Film / Color Change Part : Organic Colorants. Resin
Size Substrate:20×70×0.2mm Substrate:210×297×0.2mm
Color Change Part : φ11mm Color Change Part : 190×290mm
Q'ty / Pack 100 pcs 100 pcs 5 sheets
Pord.No PLC0207-03 PLL0207-03 PLC2130-03
Specifications
PLAZMARK For Ar Cleaning

Plasma generated mainly ions like Ar plasma

Type No.20 (Super High)
Shape Card Label Sheet
Heat Resistance 100℃
Structure Substrate:Pet Film / Color Change Part : Organic Colorants. Resin
Size Substrate:20×70×0.2mm Substrate:210×297×0.2mm
Color Change Part : φ11mm Color Change Part : 190×290mm
Q'ty / Pack 100 pcs 100 pcs 5 sheets
Pord.No PLC0207-20 PLL0207-20 PLC2130-20
Type No.21 (High)
Shape Card Label Sheet
Heat Resistance 100℃
Structure Substrate:Pet Film / Color Change Part : Organic Colorants. Resin
Size Substrate:20×70×0.2mm Substrate:210×297×0.2mm
Color Change Part : φ11mm Color Change Part : 190×290mm
Q'ty / Pack 100 pcs 100 pcs 5 sheets
Pord.No PLC0207-21 PLL0207-21 PLC2130-21
Type No.22 (Middle)
Shape Card Label Sheet
Heat Resistance 100℃
Structure Substrate:Pet Film / Color Change Part : Organic Colorants. Resin
Size Substrate:20×70×0.2mm Substrate:210×297×0.2mm
Color Change Part : φ11mm Color Change Part : 190×290mm
Q'ty / Pack 100 pcs 100 pcs 5 sheets
Pord.No PLC0207-22 PLL0207-22 PLC2130-22
Type No.23(Low)
Shape Card Label Sheet
Heat Resistance 100℃
Structure Substrate:Pet Film / Color Change Part : Organic Colorants. Resin
Size Substrate:20×70×0.2mm Substrate:210×297×0.2mm
Color Change Part : φ11mm Color Change Part : 190×290mm
Q'ty / Pack 100 pcs 100 pcs 5 sheets
Pord.No PLC0207-23 PLL0207-23 PLC2130-23