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For O2 Cleaning / Ar Cleaning

Best for mounting process and assembly process
● Surface treatment before metal plating
● Surface treatment of wire bonding / flipchip bonding
● Cleaning before under-filling, after surface mount process
● Surface treatment of sealing of electronic components, such as LSIs, memories, MEMS or LEDs

 

Lineup

For O2 Cleaning (3 sensitivity types)

Optimal for plasma processes where radicals are mainly working, such as O2, N2, Air, CH4, H2, NH3 (under certain conditions also Ar). Also adoptable for UV or UV ozone cleaning, as it is responsible to oxygen radicals.
 

For Ar Cleaning (3 sensitivity types)

This indicator responds to the plasma where mainly ions are working, such as Ar gas which is difficult to be detected by the O2 cleaning type indicator.

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For O2 / Ar Cleaning: Color Change Characteristic

 

Applications for Uniformity Evaluation

Uniformity can be evaluated

Color diffence mapping (example)

 

Specifications

PLAZMARK For O2 Cleaning
Plasma generated mainly radicals like O2 plasma (O2, N2, Air, H2, NH3, (Ar))

TypeNo. 1 (High)
ShapeCardLabelSheet
Heat Resistance100 ºC
StructureSubstrate: PET film / Color change part: organic colorants, resin
SizeSubstrate: 20 × 70 × 0.2 mmSubstrate: 210 × 297 × 0.2 mm
 Color change part: φ11 mmColor change part: 190 × 290 mm
Q'ty / Pack100 pcs100 pcs5 sheets
Prod. No.PLC0207-01PLL0207-01PLC2130-01
TypeNo. 2 (Middle)
ShapeCardLabelSheet
Heat Resistance100 ºC
StructureSubstrate: PET film / Color change part: organic colorants, resin
SizeSubstrate: 20 × 70 × 0.2 mmSubstrate: 210 × 297 × 0.2 mm
 Color change part: φ11 mmColor change part: 190 × 290 mm
Q'ty / Pack100 pcs100 pcs5 sheets
Prod. No.PLC0207-02PLL0207-02PLC2130-02
TypeNo. 3 (Low)
ShapeCardLabelSheet
Heat Resistance100 ºC
StructureSubstrate: PET film / Color change part: organic colorants, resin
SizeSubstrate: 20 × 70 × 0.2 mmSubstrate: 210 × 297 × 0.2 mm
 Color change part: φ11 mmColor change part: 190 × 290 mm
Q'ty / Pack100 pcs100 pcs5 sheets
Prod. No.PLC0207-03PLL0207-03PLC2130-03

 

Specifications

PLAZMARK for Ar Cleaning
Plasma generated mainly ions like Ar plasma

TypeNo. 20 (Super High)
ShapeCardLabelSheet
Heat Resistance100 ºC
StructureSubstrate: PET film / Color change part: organic colorants, resin
SizeSubstrate: 20 × 70 × 0.2 mmSubstrate: 210 × 297 × 0.2 mm
 Color change part: φ11 mmColor change part: 190 × 290 mm
Q'ty / Pack100 pcs100 pcs5 sheets
Prod. No.PLC0207-20PLL0207-20PLC2130-20
TypeNo. 21 (High)
ShapeCardLabelSheet
Heat Resistance100 ºC
StructureSubstrate: PET film / Color change part: organic colorants, resin
SizeSubstrate: 20 × 70 × 0.2 mmSubstrate: 210 × 297 × 0.2 mm
 Color change part: φ11 mmColor change part: 190 × 290 mm
Q'ty / Pack100 pcs100 pcs5 sheets
Prod. No.PLC0207-21PLL0207-21PLC2130-21
TypeNo. 22 (Middle)
ShapeCardLabelSheet
Heat Resistance100 ºC
StructureSubstrate: PET film / Color change part: organic colorants, resin
SizeSubstrate: 20 × 70 × 0.2 mmSubstrate: 210 × 297 × 0.2 mm
 Color change part: φ11 mmColor change part: 190 × 290 mm
Q'ty / Pack100 pcs100 pcs5 sheets
Prod. No.PLC0207-22PLL0207-22PLC2130-22
TypeNo. 23 (Low)
ShapeCardLabelSheet
Heat Resistance100 ºC
StructureSubstrate: PET film / Color change part: organic colorants, resin
SizeSubstrate: 20 × 70 × 0.2 mmSubstrate: 210 × 297 × 0.2 mm
 Color change part: φ11 mmColor change part: 190 × 290 mm
Q'ty / Pack100 pcs100 pcs5 sheets
Prod. No.PLC0207-23PLL0207-23PLC2130-23